Structuring with excimer lasers—experimental and theoretical investigations on quality and efficiency
| Autor: | K. Jasper, Gert Callies, Henrik Schittenhelm, Peter Berger, H. Hügel |
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| Rok vydání: | 1998 |
| Předmět: |
Materials science
Laser ablation Excimer laser business.industry medicine.medical_treatment Biomedical Engineering Laser Ablation Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Pulsed laser deposition law.invention Optics Quality (physics) law medicine Optoelectronics Laser beam quality business Beam homogenizer Instrumentation |
| Zdroj: | Journal of Laser Applications. 10:255-264 |
| ISSN: | 1938-1387 1042-346X |
| DOI: | 10.2351/1.521860 |
| Popis: | Manufacturing with excimer lasers is becoming an established technology in microstructuring, drilling, and laser vapor deposition. In this article an overview of the work will be given that was recently performed at the IFSW on excimer laser ablation concerning the quality and the efficiency of the ablation process. In a first part the setup used for the ablation experiments is presented. A beam homogenizer developed at IFSW is explained in more detail. The development of this device was initiated by the need for high beam quality along the whole propagation path. Results with modelings including three-dimensional heat conduction and multiple reflections of the incident beam at the hole walls will be compared with experimental findings. It will be shown that multiple reflections are responsible for the inhomogeneity of the bottom structure and can explain the quality of the ablated structure. Additionally, a few two- and three-dimensional structures obtained by using the presented setup and different work... |
| Databáze: | OpenAIRE |
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