| Autor: |
L. Hänsel, Jörg Heber, Dirk Rudloff, Markus Eckert, Jan-Uwe Schmidt, S. Frances, H. Torlee, Andreas Gehner, W. Pufe, Sebastian Döring, Matthias Schulze, Andreas Elgner, Martin Friedrichs, Christoph Hohle, Michael Wagner, Peter Dürr, Detlef Kunze |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
MOEMS and Miniaturized Systems XIX. |
| Popis: |
We developed a novel 512 x 320 tip-tilt micro mirror array (MMA) together with the entire related technology platform, including mirror fabrication process, integrated CMOS address circuitry and external drive electronics. The MMA itself consists of 2axis-tip-tilt actuators at 48μm pixel size, allowing a continuous pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable at standard deviations of better than 0.025°. The mirrors are realized within a 2-level architecture defined by three structural layers, two for hinge and reinforcement suspension and one for the overlying mirror. They are fabricated by surface-micromachining within a fully CMOS compatible process. MMA programming is accomplished by an underlying CMOS backplane supporting drive voltages up to 27V and frame rates up to 3.6kHz. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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