| Autor: |
V.N. Golovlev, J. A. Haynes, D.B. Beach, S. M. Zemskova, R.D. Hunt, Theodore M. Besmann |
| Rok vydání: |
2000 |
| Předmět: |
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| Zdroj: |
Le Journal de Physique IV. 10:Pr2-35 |
| ISSN: |
1155-4339 |
| DOI: |
10.1051/jp4:2000205 |
| Popis: |
Alumosiloxanes [Al(OSiMe 3 ) 3 ] 2 , (Me 3 SiO) 2 Al[OSi(OBu-t) 3 ], [(acac)Al(OSiMe 3 ) 2 ] 2 , (Ox)Al[OSi(OBu-t) 3 ] 2 , (Me=CH 3 ; Bu-t= t-C 4 H 9 ; acac = C 5 H 7 O 2 ; Ox = C 9 H 6 NO) have been synthesized and their thermal properties have been studied by thermogravimetric analysis in Ar over the temperature range of 25-500°C. The compounds [Al(OSiMe 3 ) 3 ] 2 and [(acac)Al(OSiMe 3 ) 2 ] 2 showed substantial volatility during heating regardless of their dimeric structures in the solid state; while the other compounds were largely decomposed under the same conditions. Therefore, [Al(OSiMe 3 ) 3 ] 2 and [(acac)Al(OSiMe 3 ) 2 ] 2 have been chosen as prospective precursors for the MOCVD of aluminosilicate coatings. Investigation of these compounds by laser mass-spectrometry (laser excitation at 355nm) has shown that the decomposition pathway proceeds through the formation of a number of heavy species originating from dimeric [>Al Al |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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