Correlation of Errors in Monochromatic Monitoring of Optical Coatings Deposition
| Autor: | A. A. Lagutina, Igor V. Kochikov, I. S. Lagutin, Alexander V. Tikhonravov, Anatoly G. Yagola, Dmitry Lukyanenko, S.A. Sharapova |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
010308 nuclear & particles physics business.industry General Physics and Astronomy 01 natural sciences Coating deposition Correlation Optical coating Optics 0103 physical sciences Monochromatic color 010306 general physics business Deposition process Layer (electronics) Deposition (law) |
| Zdroj: | Moscow University Physics Bulletin. 75:578-584 |
| ISSN: | 1934-8460 0027-1349 |
| DOI: | 10.3103/s0027134920060193 |
| Popis: | The paper presents a theoretical study of the correlation of errors in the thickness of layers of multilayer optical coatings produced using monochromatic monitoring of the deposition process. Estimates of the degree of error correlation in layer thicknesses are obtained for various algorithms for determining termination instants for layer depositions. It is shown that the parameter introduced to assess the degree of correlation gives an adequate idea of the error correlation in the case of monochromatic monitoring. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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