Ellipsometry of thin films of copper phthalocyanine

Autor: Roger Parsons, Z. Borkowska, M.W. Humphreys, M.A. Barrett
Rok vydání: 1975
Předmět:
Zdroj: Thin Solid Films. 28:289-302
ISSN: 0040-6090
DOI: 10.1016/0040-6090(75)90120-0
Popis: Ellipsometric measurements have provided qualitative information on the optical properties of CuPC films deposited on a thin gold layer substrate. Detailed interpretation was complicated by variations in the density of the deposited layers and the surface roughness of the substrate. Films less than 100 nm thick can be satisfactory represented by a single homogeneous isotropic layer. Thicker films appear to be equivalent to an isotropic inner layer and an anisotropic outer layer, where the latter results from bulk deposition of CuPC with the molecules in a predominant orientation to the surface. Reasonable agreement has been obtained between film thicknesses measured by weighing and by ellipsometry, assuming a single homogeneous anisotropic film for thickness in excess of 150 nm.
Databáze: OpenAIRE