Ellipsometry of thin films of copper phthalocyanine
Autor: | Roger Parsons, Z. Borkowska, M.W. Humphreys, M.A. Barrett |
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Rok vydání: | 1975 |
Předmět: |
Materials science
business.industry Isotropy Layer by layer Metals and Alloys Surfaces and Interfaces Substrate (electronics) Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Ellipsometry Materials Chemistry Surface roughness Thin film Composite material business Layer (electronics) Deposition (law) |
Zdroj: | Thin Solid Films. 28:289-302 |
ISSN: | 0040-6090 |
DOI: | 10.1016/0040-6090(75)90120-0 |
Popis: | Ellipsometric measurements have provided qualitative information on the optical properties of CuPC films deposited on a thin gold layer substrate. Detailed interpretation was complicated by variations in the density of the deposited layers and the surface roughness of the substrate. Films less than 100 nm thick can be satisfactory represented by a single homogeneous isotropic layer. Thicker films appear to be equivalent to an isotropic inner layer and an anisotropic outer layer, where the latter results from bulk deposition of CuPC with the molecules in a predominant orientation to the surface. Reasonable agreement has been obtained between film thicknesses measured by weighing and by ellipsometry, assuming a single homogeneous anisotropic film for thickness in excess of 150 nm. |
Databáze: | OpenAIRE |
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