Epitaxial Ferroelectric Heterostructures of Isotropic Metallc Oxide (SrRuO3) and Pb(Zr0.52Ti0.48)O3
Autor: | J.H. Marshall, Robert Joseph Cava, David K. Fork, C. H. Chen, R.M. Fleming, R. B. van Dover, Chang-Beom Eom, D.J. Werder, Julia M. Phillips |
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Rok vydání: | 1993 |
Předmět: | |
Zdroj: | MRS Proceedings. 310 |
ISSN: | 1946-4274 0272-9172 |
Popis: | We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and ferroelectric thin films [SrRuO3/Pb(Zr0.52Ti0.48)O3 /SrRuO3] on (100) SrTiO3 and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction, Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 1010 cycles with large remnant polarization. |
Databáze: | OpenAIRE |
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