256 Mbit High Density CMOS Non Volatile Memories Field Isolation by Using High Temperature Poly Buffer LOCOS(HTPBL)
Autor: | C. Leroux, F. Vinet, Georges Guegan, P. Spinelli, Simon Deleonibus, M. Heitzmann |
---|---|
Rok vydání: | 1994 |
Předmět: | |
Zdroj: | Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials. |
DOI: | 10.7567/ssdm.1994.a-12-4 |
Databáze: | OpenAIRE |
Externí odkaz: |