Novel ion optics for secondary ion suppression in sputter initiated laser post-ionisation

Autor: R. Jennings, Kenneth W. D. Ledingham, C.J. McLean, P.T. McCombes, Ravi P. Singhal
Rok vydání: 1991
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 62:285-288
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95912-w
Popis: A novel ion optics arrangement has been designed to suppress secondary ion (SIMS) detection in a sputter initiated resonant post-ionisation (SIRIS) time-of-flight mass spectrometer. The advantage over other techniques for ion suppression is its simplicity. It is likely that this technique is also applicable to a resonant post-ionisation system which is laser initiated.
Databáze: OpenAIRE