Special Features of Structural Interaction in (AlGaIn)N∕GaN Heterostructures Used as Dislocation Filters
Autor: | Evgenii Zavarin, Andrey Tsatsulnikov, Wsevolod Lundin |
---|---|
Rok vydání: | 2005 |
Předmět: | |
Zdroj: | Semiconductors. 39:100 |
ISSN: | 1063-7826 |
Popis: | The behavior of threading dislocations in AlGaN and InGaN layers incorporated into GaN-based heterostructures is studied. It is shown that InGaN layers with an intermediate composition can be used as the most effective dislocation filters. Estimations of the stresses generated by dislocations and nanodomains show good agreement between the theory and experiment. |
Databáze: | OpenAIRE |
Externí odkaz: |