A new scheduling approach using combined dispatching criteria in wafer fabs
| Autor: | Russ M. Dabbas, John W. Fowler |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Engineering
business.industry Semiconductor device fabrication Design of experiments Scheduling (production processes) Condensed Matter Physics Industrial and Manufacturing Engineering Manufacturing engineering Electronic Optical and Magnetic Materials Reliability engineering Wafer fabrication Production control Single rule Wafer Electrical and Electronic Engineering Linear combination business |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 16:501-510 |
| ISSN: | 0894-6507 |
| DOI: | 10.1109/tsm.2003.815201 |
| Popis: | In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using this new approach show significant improvement versus the use of a single dispatching criterion. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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