Surface textured silicon single-photon avalanche diode

Autor:	Jian-Wei Pan, Theodore I. Kamins, Colleen Shang, Xiao Jiang, Yijie Huo, Xun Ding, Kai Zang, Qiang Zhang, Muyu Xue, Ching-Ying Lu, Yusi Chen, James S. Harris, Xiaochi Chen, Matthew Morea
Rok vydání:	2017
Předmět:	Materials science Silicon business.industry ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY 02 engineering and technology Chemical vapor deposition Trapping 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics Optics CMOS chemistry Single-photon avalanche diode 0103 physical sciences Hardware_INTEGRATEDCIRCUITS Reflection (physics) Optoelectronics 0210 nano-technology business Lithography ComputingMethodologies_COMPUTERGRAPHICS Jitter
Zdroj:	Conference on Lasers and Electro-Optics.
DOI:	10.1364/cleo_si.2017.sm3k.2
Popis:	We present a surface textured Si SPAD with improved detection efficiency and without sacrificing dark count rate or jitter distribution. Texturing reduces reflection, allows weak light trapping and is CMOS and lithography compatible.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::85d7f5386709f317d67d978014f85229 https://doi.org/10.1364/cleo_si.2017.sm3k.2 Zobrazit plný text záznamu