| Autor: |
Victoria J. Bruce, W.-L. Chong, D.A. Benson, Daniel L. Barton, C.F. Hawkins, David H. Eppes, C.L. Henderson, Jacob Wilcox, Mike Bruce, R.M. Ring, J.M. Soden, Paiboon Tangyunyong, Edward I. Cole |
| Rok vydání: |
2004 |
| Předmět: |
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| Zdroj: |
The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003.. |
| Popis: |
Defect localization in modern ICs can be extremely challenging. To address this complexity several optically based methodologies have been developed over the past decade. These techniques will be described demonstrating their utility in locating defects. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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