Growth mode transition of Ni thin films on nanopatterned substrate: Kinetic Monte Carlo simulations
| Autor: | Yuan Zhu, Shu-Han Chen, Jingshu Liang, Shao-Ji Jiang |
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| Rok vydání: | 2012 |
| Předmět: |
Materials science
Condensed matter physics business.industry General Physics and Astronomy Surfaces and Interfaces General Chemistry Substrate (electronics) Condensed Matter Physics Kinetic energy Surfaces Coatings and Films Optics Deposition (phase transition) Kinetic Monte Carlo Triangular prism Thin film Diffusion (business) business Anisotropy |
| Zdroj: | Applied Surface Science. 258:4857-4860 |
| ISSN: | 0169-4332 |
| Popis: | A three-dimension (3D) kinetic Monte Carlo (KMC) model with Ehrlich–Schwoebel barrier is presented. A uniform arranged triangular prism structure is introduced to mimic the nanopatterned substrate. The transition from continuous growth to anisotropic columnar growth has been demonstrated. The kinetic process and the growth exponent are discussed by our KMC model. Results show that the growth exponent is smaller than 0.5 when the film thickness surpasses 70 ML under normal deposition but larger than 0.5 under high oblique angle deposition, such as 77°. We assume that the modulation of nanopatterned substrate reduces more quickly when the film thickness is larger than 70 ML in our model. The growth mode transition can be mainly attributed to difference in the relative importance of diffusion and shadowing with normal and high oblique angle deposition conditions. Besides, the competition and vanishing process during oblique angle deposition are also demonstrated. |
| Databáze: | OpenAIRE |
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