Semi-Supervised Framework for Wafer Defect Pattern Recognition with Enhanced Labeling

Autor:	Leon Li-Yang Chen, Katherine Shu-Min Li, Jwu E. Chen, Xu-Hao Jiang, Andrew Yi-Ann Huang, Chun-Lung Hsu, Hsing-Chung Liang, Sying-Jyan Wang
Rok vydání:	2021
Předmět:	Computer science business.industry Pattern recognition (psychology) Wafer Pattern recognition Artificial intelligence business
Zdroj:	ITC
DOI:	10.1109/itc50571.2021.00029
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::85b7938ac535c59f8a40865c26b64e06 https://doi.org/10.1109/itc50571.2021.00029 Zobrazit plný text záznamu