Implementation of Surface Acoustic Wave Vapor Sensor Using Complementary Metal–Oxide–Semiconductor Amplifiers

Autor:	Erik S. Jeng, Guo-Wei Huang, Ching Chun Chang, Kang Ming Peng, Chia Sung Chiu, Chia Lin Ku, Lin-Kun Wu, Wen Lin Chen
Rok vydání:	2009
Předmět:	Fabrication Materials science Offset (computer science) Physics and Astronomy (miscellaneous) business.industry Amplifier Surface acoustic wave General Engineering General Physics and Astronomy Delay line oscillator dBc CMOS Phase noise Optoelectronics business
Zdroj:	Japanese Journal of Applied Physics. 48:04C182
ISSN:	1347-4065 0021-4922
Popis:	A surface acoustic wave (SAW) vapor sensor is presented in this work. A SAW delay line oscillator on quartz substrate with the high gain complementary metal–oxide–semiconductor (CMOS) amplifier using a two-poly–two-metal (2P2M) 0.35 µm process was designed. The gain of the CMOS amplifier and its total power consumption are 20 dB and 70 mW, respectively. The achieved phase noise of this SAW oscillator is -150 dBc/Hz at 100 kHz offset. The sensing is successfully demonstrated by a thin poly(epichlorohydrin) (PECH) polymer film on a SAW oscillator with alcohol vapor. This two-in-one sensor unit includes the SAW device and the CMOS amplifier provides designers with comprehensive model for using these components for sensor circuit fabrication. Furthermore it will be promising for future chemical and biological sensing applications.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::858d6aa47fc515c8b349dbdd5f501ccf https://doi.org/10.1143/jjap.48.04c182 Zobrazit plný text záznamu