Crystal structure and surface morphology of the Ba 0.7 Sr 0.3 TiO 3 thin films deposited by pulsed laser deposition

Autor:	V.F. Gremenok, V. A. Emelyanov, V. L. Romanyuk, S. O. Abetkovskaia, V. S. Syakersky, V. S. Merkulov, R. R. Chyhir
Rok vydání:	2009
Předmět:	Crystallography Carbon film Materials science Annealing (metallurgy) Analytical chemistry Surface finish Crystal structure Combustion chemical vapor deposition Thin film Condensed Matter Physics Grain size Pulsed laser deposition
Zdroj:	physica status solidi c. 6:985-988
ISSN:	1610-1642 1862-6351
DOI:	10.1002/pssc.200881184
Popis:	Ba0.7Sr0.3TiO3 (BST) thin films have been deposited on Si substrates under two different temperatures (200 °C and 450 °C) by pulsed laser deposition (PLD) technique. The structural characterization of the BST thin films was performed by X-ray diffraction (XRD) and the surface morphology was explored by atomic force microscopy (AFM). All films were found to be crystalline with preferred (100) plane orientation. The diffraction patterns from XRD analysis are attributed to cubic perovskite structure. Annealing did not result in considerable change in XRD spectra of the films. The annealing after deposition resulted in increasing of the grain size and had almost no influence on the roughness of the Ba0.7Sr0.3TiO3 thin film. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::858670abbf2837ca73f1c5e8311c0d8d https://doi.org/10.1002/pssc.200881184 Zobrazit plný text záznamu Plný text