Photopatternable Imaging Layers for Controlling Block Copolymer Microdomain Orientation
Autor: | E. Han, I. In, S.-M. Park, Y.-H. La, Y. Wang, P. F. Nealey, P. Gopalan |
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Rok vydání: | 2007 |
Předmět: | |
Zdroj: | Advanced Materials. 19:4448-4452 |
ISSN: | 1521-4095 0935-9648 |
DOI: | 10.1002/adma.200602708 |
Popis: | The present invention provides structures including a substrate, a crosslinked polymer film disposed over the substrate, and a patterned diblock copolymer film disposed over the crosslinked polymer film. The crosslinked polymer comprises a random copolymer polymerized from a first monomer, a second monomer, and a photo-crosslinkable and/or thermally crosslinkable third monomer, including epoxy-functional or acrylyol-functional monomers. Also disclosed are methods for forming the structures. |
Databáze: | OpenAIRE |
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