Photopatternable Imaging Layers for Controlling Block Copolymer Microdomain Orientation

Autor: E. Han, I. In, S.-M. Park, Y.-H. La, Y. Wang, P. F. Nealey, P. Gopalan
Rok vydání: 2007
Předmět:
Zdroj: Advanced Materials. 19:4448-4452
ISSN: 1521-4095
0935-9648
DOI: 10.1002/adma.200602708
Popis: The present invention provides structures including a substrate, a crosslinked polymer film disposed over the substrate, and a patterned diblock copolymer film disposed over the crosslinked polymer film. The crosslinked polymer comprises a random copolymer polymerized from a first monomer, a second monomer, and a photo-crosslinkable and/or thermally crosslinkable third monomer, including epoxy-functional or acrylyol-functional monomers. Also disclosed are methods for forming the structures.
Databáze: OpenAIRE