Reevaluating the conventional approach for analyzing spectroscopic ellipsometry psi/delta versus time data. Additional statistical rigor may often be appropriate
| Autor: | H. Dennis Tolley, Matthew R. Linford, Jacob D. Bagley |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
Nanotechnology 02 engineering and technology Surfaces and Interfaces General Chemistry Time data 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Materials Chemistry Spectroscopic ellipsometry Distance analysis 0210 nano-technology Algorithm |
| Zdroj: | Surface and Interface Analysis. 48:186-195 |
| ISSN: | 0142-2421 |
| DOI: | 10.1002/sia.5938 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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