Design space exploration for early identification of yield limiting patterns
| Autor: | Joe Kwan, JinYan Wang, Hussein Ali, Aliaa Kabeel, Sid Hong, Wael ElManhawy, Square Liu, Recco Zhang, Helen Li, Kareem Madkour, Danny Hsu, Chunshan Du, Elain Zou, Robben Lee |
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| Rok vydání: | 2016 |
| Předmět: |
Computer science
Design space exploration Real-time computing 02 engineering and technology Limiting 021001 nanoscience & nanotechnology computer.software_genre 01 natural sciences Design for manufacturability 010309 optics 0103 physical sciences Hardware_INTEGRATEDCIRCUITS Data mining Design rule checker 0210 nano-technology computer |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | In order to resolve the causality dilemma of which comes first, accurate design rules or real designs, this paper presents a flow for exploration of the layout design space to early identify problematic patterns that will negatively affect the yield. A new random layout generating method called Layout Schema Generator (LSG) is reported in this paper, this method generates realistic design-like layouts without any design rule violation. Lithography simulation is then used on the generated layout to discover the potentially problematic patterns (hotspots). These hotspot patterns are further explored by randomly inducing feature and context variations to these identified hotspots through a flow called Hotspot variation Flow (HSV). Simulation is then performed on these expanded set of layout clips to further identify more problematic patterns. These patterns are then classified into design forbidden patterns that should be included in the design rule checker and legal patterns that need better handling in the RET recipes and processes. |
| Databáze: | OpenAIRE |
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