| Autor: |
A. Verheul, P.F.M. Delmee, M. J. van der Wiel, W. J. J. Wolfis, G. E. van Dorssen, W. Kersbergen, Frederik Bijkerk, H. van Brug, E.J. Puik |
| Rok vydání: |
1988 |
| Předmět: |
|
| Zdroj: |
Physics, Fabrication, and Applications of Multilayered Structures ISBN: 9781475700930 |
| DOI: |
10.1007/978-1-4757-0091-6_36 |
| Popis: |
A prime application of figured multilayer structures as X-ray optics is the combination with a laser produced plasma. As a source of soft X-rays, a laser-plasma has proven its attractive properties: a high instantaneous brightness, good shot-to-shot stability and nearly pointlike dimensions. The combination of laser-plasma and X-ray optics would give improved performance in e.g. plasma diagnostics, rapid detection of low Z elements in solid samples, pulsed laser irradiated materials and lithographic imaging of submicron patterns. In the latter application, a parabolic multilayer structure has the potential to convert the emission of the point source into a large parallel and homogeneous beam to prevent several distortions in the lithographic imaging. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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