Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

Autor:	Ichio Arikata, Ryohei Itatani, Takashi Namura, Osamu Fukumasa, Makoto Kubo
Rok vydání:	1992
Předmět:	Physics Electron Plasma Electron cyclotron resonance law.invention Magnetic field Ignition system Nuclear magnetic resonance Physics::Plasma Physics law Electrical equipment Magnet Atomic physics Antenna (radio) Instrumentation
Zdroj:	Review of Scientific Instruments. 63:21-30
ISSN:	1089-7623 0034-6748
Popis:	A comparative study on the generation of 2.45‐GHz multicusp electron cyclotron resonance (ECR) plasma is performed. Looped cusp structures such as the ring‐cusp give a low‐power and low‐pressure ignition, and vice versa, indicating an importance to keep the electron trajetory of gradient‐B drift motion inside the chamber even in the case of ECR plasmas. The importance of the antenna location in such multicusp fields is elucidated by comparison in two cases of the axial antenna located in the weak magnetic field region, generating a hydrogen plasma of limited density (ne
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::84da3ecd1fafa987d6c2346b39091b26 https://doi.org/10.1063/1.1142961 Zobrazit plný text záznamu