A Study of a Single-Wafer Process in Metal Contact Hole Cleaning

Autor:	Jae Yong Park, Jong Kook Song, Han Mil Kim, Hee Kang Cho, Tae Gyun Kim, Bong Ho Moon, Eun Su Rho, Leo Archer, Won Ho Cho
Rok vydání:	2007
DOI:	10.4028/3-908451-46-9.177
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::84d7b68fa2ff9631f5bd16b9d04c4759 https://doi.org/10.4028/3-908451-46-9.177 Zobrazit plný text záznamu