Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial Sensors

Autor:	Theo Miani, Lokesh Gurung, Guillermo Sobreviela-Falces, Douglas Young, Colin Baker, Ashwin A. Seshia
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::84ad6baa089b44022b7e21f787f211ec https://doi.org/10.1109/mems49605.2023.10052540 Zobrazit plný text záznamu