CuO-loaded nano-porous SnO2 films fabricated by anodic oxidation and RIE process and their gas sensing properties
| Autor: | Jeong-Hoon Jeun, Seong-Hyeon Hong |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Materials science
Annealing (metallurgy) Anodizing Metals and Alloys Analytical chemistry Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Barrier layer Electrical resistance and conductance X-ray photoelectron spectroscopy Chemical engineering Materials Chemistry Electrical and Electronic Engineering Reactive-ion etching Thin film Instrumentation FOIL method |
| Zdroj: | Sensors and Actuators B: Chemical. 151:1-7 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2010.10.002 |
| Popis: | The fabrication of nano-porous SnO 2 films with 1-D nano-channels by anodic oxidation has been a challenge due to a collapse of pore structure during annealing process and an existence of non-porous upper barrier layer. A new approach is developed to synthesize the nano-porous SnO 2 films by employing Sn thin film instead of Sn foil and a reactive ion etching (RIE) process. The integrity of nano-porous structure was maintained by anodizing the Sn thin film deposited on SiO 2 /Si substrate, and 1-D nano-channels were opened up by removing the non-porous layer by RIE. As a potential application to gas sensor, CuO was impregnated to the nano-porous SnO 2 films and their gas sensing properties were investigated. The nano-porous CuO–SnO 2 film sensors exhibited the enhanced sensitivity and selectivity toward H 2 S gas, and their H 2 S sensing mechanism was discussed in terms of the formation/disruption of resistive p-CuO/n-SnO 2 junction based on the variation of XPS binding energy and electrical resistance during gas exposure. |
| Databáze: | OpenAIRE |
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