Autor:	白金超 Bai Jin-chao, 赵磊 Zhao Lei, 王静 Wang Jing, 宋勇志 Song Yong-zhi, 曲泓铭 Qu Hong-ming, 张亮 Zhang Liang, 郭会斌 Guo Hui-bin, 张益存 Zhang Yi-cun
Rok vydání:	2017
Předmět:	chemistry.chemical_compound Materials science Silicon nitride chemistry Etching (microfabrication) business.industry Signal Processing Optoelectronics business Instrumentation Electronic Optical and Magnetic Materials
Zdroj:	Chinese Journal of Liquid Crystals and Displays. 32:533-537
ISSN:	1007-2780
DOI:	10.3788/yjyxs20173207.0533
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::848754d5a65791cb57525c25a4a91711 https://doi.org/10.3788/yjyxs20173207.0533 Zobrazit plný text záznamu