Selective Growth Method of Carbon Nanotubes by Chemical Vapor Deposition

Autor:	Yoichiro Arakawa, Masahiro Nakajima, Yoshiaki Imaizumi, Toshio Fukuda, Fumihito Arai
Rok vydání:	2008
Předmět:	Fabrication Materials science Mechanical Engineering Nanotechnology Chemical vapor deposition Carbon nanotube Focused ion beam law.invention Barrier layer Membrane Mechanics of Materials law Etching (microfabrication) General Materials Science Layer (electronics)
Zdroj:	TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 74:288-294
ISSN:	1884-8338 0387-5008
DOI:	10.1299/kikaia.74.288
Popis:	Carbon nanotubes (CNTs) are potentially useful for developing functional nanodevices such as thermal probes, flow sensor arrays, and AFM probes. Controlling the growth position of CNTs grown by chemical vapor deposition (CVD) is crucial to fabrication of these nanodevices. We propose an easy, non-lithographic process of making CNT sensor probes using CVD. Growth positions of CNTs were precisely controlled by depositing a patterned barrier layer above the catalyst layer. Then, the CNTs were grown from the exposed catalyst layer using CVD. This method is easily applied to assembling bridged CNTs. We used focused ion beam etching to remove the barrier layer and expose the catalyst membrane. Through the proposed method, we made a bridge of CNTs at the tip of a Si edge. This type of bridge can be used as the nanoprobes for local sensing of physical properties.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::846ebd643e7fac3d808789cd1cbbf54d https://doi.org/10.1299/kikaia.74.288 Zobrazit plný text záznamu