| Autor: |
null Pavlov O. N., null Iachuk V. A., null Lukiantsev D. S., null Pavolotsky A.B., null Lubenchenko O. I., null Ivanov D. A., null Lubenchenko A. V. |
| Rok vydání: |
2022 |
| Zdroj: |
Technical Physics. 92:990 |
| ISSN: |
1726-748X |
| DOI: |
10.21883/tp.2022.08.54561.68-22 |
| Popis: |
A technique of controlled formation of multilayer oxide and suboxide layers on a thin metal film. An opportunity of controlled generation of films containing an ultra-thin suboxide layer inside a higher oxide layer and films being a periodic layered structure with alternating oxide layers of various oxidation levels. A structure containing alternating ultra-thin layers of higher oxide and suboxide layers on a niobium film. Keywords: metal-oxide films, controlled film formation, layer chemical and phase profiling, X-ray photoelectron spectroscopy. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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