Master-Slaves Control Based on Model Reference Sliding-Mode Control (Temperature Locus Follow-Up Control of Multi-Zone Cooling Plate)

Autor:	Shinichi Yokota, Satoshi Fukuhara, Kenichi Bandoh
Rok vydání:	2004
Předmět:	Nonlinear system Temperature control Materials science Adaptive control Mechanics of Materials Mechanical Engineering Process (computing) Process control Wafer Mechanics Atmospheric temperature range Robust control Industrial and Manufacturing Engineering
Zdroj:	TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 70:2329-2336
ISSN:	1884-8354 0387-5024
DOI:	10.1299/kikaic.70.2329
Popis:	Most heat treatment equipments that control a large area to uniform temperature are divided into two or more zones, and the temperature control of each zone is carried out individually. However, for two or more zones with time delay, nonlinearity, uncertainty, and unknown disturbance, it is difficult to control each zone to an uniform temperature. Therefore, we propose a master-slaves control that can make those temperature loci in agreement with high precision. The proposed method is designed based on model reference sliding-mode control (MRSMC). Experimental results illustrate the effectiveness of the proposed method with applying to the multi-zone cooling plate for chilling a 300 [mm] wafer. By the proposed method, the temperature range across the wafer in cooling process is reduced within ± 0.1 [°C].
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::845457ebb86d2f6d5031dbc424e6e2dc https://doi.org/10.1299/kikaic.70.2329 Zobrazit plný text záznamu