About the Interface Between the Higher Manganese Silicide Film and Si (111)

Autor:	D.K. Kabilov, M.E. Azimov, S.Kh. Babadjanov, R.Kh. Kamilova, A.S. Orekhov, V. V. Klechkovskaya, T.S. Kamilov, E.I. Suvorova
Rok vydání:	2006
Předmět:	Crystallography Materials science Electron diffraction Vacuum deposition Silicon chemistry Manganese silicide Transmission electron microscopy Analytical chemistry chemistry.chemical_element Crystallite Single crystal Amorphous solid
Zdroj:	2006 25th International Conference on Thermoelectrics.
DOI:	10.1109/ict.2006.331317
Popis:	The higher manganese silicide (HMS) films were grown in a high-vacuum reactor temperature as a result of interaction of Mn vapour with Si-substrate subsurface layer at the substrate temperature ~ 1040degC. The films have been investigated by electron diffraction and transmission electron microscopy. It was shown that the higher manganese silicide grains were formed at the substrate surface and they grew in lower direction from initial substrate. After 2 mum in lower direction from the films surface the polycrystalline interlayer with thickness of 100-150 nm and cubic lattice (a=4,36Aring) was formed. At the interface between Si (111) single crystal and the HMS films thin amorphous layer was observed
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8440a77045fefdb5593b00582a9164d5 https://doi.org/10.1109/ict.2006.331317 Zobrazit plný text záznamu