Single-shot Interferometry of Film-covered Objects
| Autor: | Kazuyoshi Suzuki, Takuto Naito, Hidemitsu Ogawa, Masashi Sugiyama, Katsuichi Kitagawa |
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| Rok vydání: | 2009 |
| Předmět: |
Surface (mathematics)
Materials science Liquid-crystal display business.industry Mechanical Engineering ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Single shot GeneralLiterature_MISCELLANEOUS law.invention Vibration Interferometry Optics Semiconductor law ComputerApplications_MISCELLANEOUS business ComputingMethodologies_COMPUTERGRAPHICS |
| Zdroj: | Journal of the Japan Society for Precision Engineering. 75:1315-1322 |
| ISSN: | 1882-675X 0912-0289 |
| Popis: | In the semiconductor and LCD manufacturing industry, there is a strong demand for measuring film thickness and surface profiles of film-covered objects. In this paper, we propose a single-shot algorithm for simultaneous measurement of film thickness and surface profiles. Unlike existing multiple-shot methods, our method requires only one image for measurement and thus it is fast and highly robust against vibration. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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