Feasibility study of a partially released lead-zirconate-titanate (PZT) Diaphragm micro-actuator
| Autor: | Guozhong Cao, Yifeng Liu, Chuan Luo, I. Y. Shen |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Engineering
Cantilever Acoustics 02 engineering and technology Lead zirconate titanate 01 natural sciences chemistry.chemical_compound Deflection (engineering) 0103 physical sciences Electrical and Electronic Engineering Instrumentation 010302 applied physics business.industry Metals and Alloys Natural frequency Structural engineering 021001 nanoscience & nanotechnology Condensed Matter Physics Piezoelectricity Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Electrode 0210 nano-technology Actuator business |
| Zdroj: | Sensors and Actuators A: Physical. 259:1-13 |
| ISSN: | 0924-4247 |
| Popis: | Piezoelectric thin-film micro-sensors and actuators often appear in the form of a diaphragm anchored around its entire boundary. When a micro-device is scaled down in size, its sensitivity reduces and natural frequency increases, drastically lowering its performance. The purpose of the paper is to study the feasibility of introducing through-etched slots to partially release the diaphragm at its anchor. As a result, a micro-device can be scaled down in size without significantly altering its sensitivity and natural frequency. In this paper, we first present a finite element simulation proving the concept. We then describe processing steps to fabricate a lead-zirconate-titanate (PZT) thin-film diaphragm sensor/actuator with a partially released boundary. Challenges encountered in the fabrications, such as cat ear and electrode non-uniformity, are explained and overcome. As a case study, we demonstrate the feasibility to design, fabricate, and test an intra-cochlear micro-actuator probe that employs three partially released PZT diaphragms at the tip of a cantilever. Experimental measurements indicate that the sensitivity is dominated by the diaphragm deflection, while the first natural frequency is dominated by the cantilever structure. Finite element simulations not only confirm the experimental measurements but also optimize diaphragm dimensions for sensor/actuator performance. |
| Databáze: | OpenAIRE |
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