Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR

Autor:	Xiao-Yong Fang, Kai-Ming Hu, Ge Yan, Zhi-Yuan Wu, Jia-Hao Wu, Wen-Ming Zhang
Rok vydání:	2022
Předmět:	Mechanical Engineering Electrical and Electronic Engineering
Zdroj:	Journal of Microelectromechanical Systems. 31:134-142
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2021.3130001
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::83a58276e8df0c3d0dae54e3129db7da https://doi.org/10.1109/jmems.2021.3130001 Zobrazit plný text záznamu