Investigation of a RF-discharge by Langmuir probe diagnostics and optical emission spectrometry (OES)
| Autor: | Tran, Q.V., Budaev, V.P., Kavyrshin, D.I., Fedorovich, S.D., Karpov, A.V., Rogozin, K.A., Konkov, A.A. |
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| Jazyk: | angličtina |
| Rok vydání: | 2023 |
| DOI: | 10.34854/icpaf.2023.50.2023.1.1.155 |
| Databáze: | OpenAIRE |
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