Highly reliable epitaxial YBaCuO thin-films using pressure-controlled magnetron sputtering method

Autor:	Takahiro Awaji, Masahiro Iyori, Takeshi Kobayashi, Ken Sakuta
Rok vydání:	1991
Předmět:	High-temperature superconductivity Materials science Mean free path Analytical chemistry Sputter deposition Epitaxy Electronic Optical and Magnetic Materials law.invention Crystallinity Lattice constant law Torr Electrical and Electronic Engineering Thin film
Zdroj:	IEEE Transactions on Magnetics. 27:1414-1417
ISSN:	1941-0069 0018-9464
Popis:	The authors systematically investigated the effects of discharge gas pressure on in situ YBaCuO thin-film formation by RF magnetron sputtering and ensured the reliability of the epitaxial YBaCuO films by pressure control. The film (100-nm thick and no protection) showed no sign of degradation in its T/sub c/ value for approximately 3000 h. Under the controlled discharge gas pressure, the in situ epitaxial YBaCuO film had a T/sub c/ of 87 K. The c-axis lattice constants and the critical temperatures came very close to the bulk values as the pressure was rising to 1 torr. The plasma emission spectra showed a reduction in the Ar spectrum intensities relative to the oxygen component with increasing pressure. This observation suggests that the reduced mean free path of the gas atoms is responsible for the improved film crystallinity and superconductivity.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8373ed16112a96d879d72cd0945c9d21 https://doi.org/10.1109/20.133450 Zobrazit plný text záznamu