Performance analysis of bimorph cantilever beam using piezoelectric materials and MEMS technology
| Autor: | Arun Pratap Singh Rathod, Abhilasha Mishra, Brijesh Kumar, Kamlesh Kukreti |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Cantilever Fabrication Multiphysics Mechanical engineering Bimorph 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity Zirconate 0103 physical sciences 0210 nano-technology Mechanical energy |
| Zdroj: | Materials Today: Proceedings. 46:10865-10869 |
| ISSN: | 2214-7853 |
| DOI: | 10.1016/j.matpr.2021.01.875 |
| Popis: | This research paper is an attempt to present an insight into the use of micro electromechanical systems (MEMS) technology harvesting of green energy. One of the common examples of MEMS technology is by utilizing bimorph cantilever beams. Subsequently, it has also been discussed that Bimorph cantilever beam based sensors with high sensing ability could be used for harvesting energy from the physical environment. In this paper, we concentrate on the comparative analysis of the MEMS and piezoelectric materials which are used to design bimorph cantilever beams and convert mechanical energy into electrical energy. Detailed performance analysis of bimorph cantilever beams made of different materials has been carried out through various simulation models. Design and the simulation of bimorph cantilever beam is performed using Comsol multiphysics 5.2. state of art software. Comparative analysis of Lead zirconate (PZT-4D) and Lead zirconate (PZT-7A) has been done in this research to find more suitable material for fabrication of bimorph cantilever beams. PZT-7A is found to provide better electrical output for various analysis performed. |
| Databáze: | OpenAIRE |
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