How to simultaneously reduce α and β error with SPC? A multivariate process control approach

Autor:	R. Nasongkhla, J.G. Shanthikumar, R.K. Nurani, M. McIntyre
Rok vydání:	2002
Předmět:	Analysis of covariance Multivariate statistics Signal-to-noise ratio Covariance matrix Statistics Principal component analysis Metric (mathematics) Computer Science::Software Engineering Control chart Statistical process control Mathematics
Zdroj:	IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168).
DOI:	10.1109/asmc.1998.731373
Popis:	We describe the multivariate statistical process control approach which uses a weighted average metric as a metric plotted on a control chart. We show that the optimal weighted coefficient is a function of the mean-shift vector and covariance matrix of metrics of interest. The control chart constructed by this optimal weighted average metric will have the highest signal to noise ratio and the lowest /spl alpha/ and /spl beta/ errors. A numerical example using actual data from a fab is also provided.
Databáze:	OpenAIRE
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