The Element Composition Variation in Lead Zirconate Titanate upon the Ion-Plasma Deposition: Experiment and Simulation
| Autor: | Andrey Tumarkin, V. P. Pronin, V. A. Vol’pyas, D. M. Dolgintsev, E. Yu. Kaptelov, I. P. Pronin, S. V. Senkevich, A. B. Kozyrev |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Phase boundary Materials science Solid-state physics Sputter deposition Condensed Matter Physics Lead zirconate titanate 01 natural sciences Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry 0103 physical sciences Deposition (phase transition) Diffusion (business) Composite material Thin film 010306 general physics Solid solution |
| Zdroj: | Physics of the Solid State. 61:1223-1227 |
| ISSN: | 1090-6460 1063-7834 |
| DOI: | 10.1134/s1063783419070308 |
| Popis: | The element composition modification is experimentally studied in PZT thin films obtained via the RF magnetron sputtering with variable working gas pressure. The experimental data were interpreted through the statistic simulation of thermalization and diffusion of sprayed Pb, Zr, and Ti atoms during the ion-plasma deposition of PZT thin films. The simulation data are shown to adequately describe (within the limits of 5%) the change in element composition at various pressures of the gas environment. The study conducted enables one to produce PZT thin films with a set element composition, which is essential for optimizing the electric and physical properties of solid solutions at the morphotropic phase boundary. |
| Databáze: | OpenAIRE |
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