Frequency dependence of the lifetime of a surface micromachined microengine driving a load
| Autor: | Kenneth A. Peterson, Samuel L. Miller, Lloyd W. Irwin, Danelle M. Tanner, Norman F. Smith, William P. Eaton, Paiboon Tangyunyong, William M. Miller, D.C. Senft, Michael T. Dugger |
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| Rok vydání: | 1999 |
| Předmět: |
Materials science
business.industry Electrical engineering Frequency effect Frequency dependence Revolute joint Condensed Matter Physics Rotational frequency Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Mechanical system Fracture (geology) Electrical and Electronic Engineering Composite material Safety Risk Reliability and Quality business human activities |
| Zdroj: | Microelectronics Reliability. 39:401-414 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/s0026-2714(98)00248-0 |
| Popis: | Experiments have been performed on surface micromachined microengines driving load gears to determine the rotational frequency dependence on median cycles to failure. A sample of 272 microengines, each driving a load, was stressed at eight different frequencies. Frequency dependence was observed and a model was developed based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances led to fracture of the pin joint in the drive gear. |
| Databáze: | OpenAIRE |
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