Studying Effect of Adding Buffer Gases to TRIES Gas on the Electron Transport Coefficients

Autor:	Do Anh Tuan, Phan Thi Tuoi, Tang Cam Nhung, Pham Xuan Hien
Rok vydání:	2019
Předmět:	Range (particle radiation) Number density Materials science Physics::Plasma Physics Electric field Thermodynamics Plasma Chemical vapor deposition Boltzmann equation Electron transport chain Plasma polymerization
Zdroj:	Advances in Engineering Research and Application ISBN: 9783030374969
DOI:	10.1007/978-3-030-37497-6_80
Popis:	The electron transport coefficients in TRIES-Kr, TRIES-He, TRIES-Xe and TRIES-Ne mixtures were firstly calculated by using two-term approximation of the Boltzmann equation for the E/N (ratio of the electric field E to the neutral number density N) range of 0.1–1000 Td (Townsend). The influences of adding different amounts of inert gases on the electron transport coefficient of TRIES-inert gases mixtures are investigated for industrial purposes, specifically in plasma polymerization and plasma enhancing chemical vapour deposition.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::82bac64d8df5946a0aa579d3c8bcfd7d https://doi.org/10.1007/978-3-030-37497-6_80 Zobrazit plný text záznamu