Chemical Vapor Deposition of Metal Borides, 4: The Application of Polyhedral Boron Clusters to the Chemical Vapor Deposition Formation of Gadolinium Boride Thin-film Materials

Autor: Yexin Tan, James T. Spencer, Shreyas S. Kher
Rok vydání: 1996
Předmět:
Zdroj: Applied Organometallic Chemistry. 10:297-304
ISSN: 1099-0739
0268-2605
DOI: 10.1002/(sici)1099-0739(199604)10:3/4<297::aid-aoc460>3.0.co;2-d
Popis: The chemical vapor deposition of high-quality polycrystalline thin films of gadolinium hexaboride, GdB 6 , was achieved through the vacuum copyrolysis of gas-phase boron hydride clusters, such as nido-pentaborane(9) [B 5 H 9 ] and nidodecaborane(14) [B 10 H 14 ], and gadolinium(III) chloride. These films typically displayed deep blue colors, were very hard and adhered very well to most deposition substrates. Depositions were carried out on a variety of substrates including quartz, copper, silicon, SiO 2 and ceramic materials. X-ray diffraction and scanning electron microscopic data showed the formation of highly crystalline materials with a strongly preferred orientation in the (111) direction. Attempted depositions of gadolinium boride films on CaF 2 (111) resulted in the apparent formation of a ternary (Ca/Gd)B 6 phase in which the calcium is presumably substituted for gadolinium atoms in the cubic GdB 6 structure. The gadolinium boride thin films were investigated by scanning electron microscopy (SEM), X-ray emission spectroscopy (XES), X-ray diffraction (XRD), and glow-discharge mass spectrometry (GDMS). GDMS showed that the GdB 6 films were relatively uniform in composition in the bulk material.
Databáze: OpenAIRE
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