Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films
| Autor: | Suenne Kim, Sungmo Park, Jungtae Lee, Hyun Jin Kim, Jaekyun Kim, Ilsin An |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Materials science
business.industry Annealing (metallurgy) Process Chemistry and Technology Oxide chemistry.chemical_element Polarization (waves) Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound Data acquisition chemistry law Ellipsometry Materials Chemistry Optoelectronics Electrical and Electronic Engineering Thin film Crystallization business Instrumentation Indium |
| Zdroj: | Journal of Vacuum Science & Technology B. 37:062918 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.5122707 |
| Popis: | Null imaging ellipsometry was developed to show the net change in polarization state between two samples. This system has no moving parts for nulling and does not exhibit azimuthal dependence on the optical elements. Therefore, this system is fast in data acquisition and easy to operate. In addition, image uniformity can be improved through a normalization process. For a demonstration, this system was applied to annealing studies of indium oxide thin films. The results show that this system can visualize the temperature dependence of the annealing as well as the progress of the annealing over time.Null imaging ellipsometry was developed to show the net change in polarization state between two samples. This system has no moving parts for nulling and does not exhibit azimuthal dependence on the optical elements. Therefore, this system is fast in data acquisition and easy to operate. In addition, image uniformity can be improved through a normalization process. For a demonstration, this system was applied to annealing studies of indium oxide thin films. The results show that this system can visualize the temperature dependence of the annealing as well as the progress of the annealing over time. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|