Numerical Simulation of Electron Transport in Electric and Magnetic Fields for Analysis of Electron Temperature and Number Density Profiles Measured in Argon Magnetic Neutral Loop Discharge Plasma

Autor:	Tsuyoshi Osaga, Hideo Tsuboi, Seiji Ogata, Kiyoshi Kuwahara, Hirotake Sugawara
Rok vydání:	2010
Předmět:	Physics Argon Number density Monte Carlo method General Engineering General Physics and Astronomy chemistry.chemical_element Plasma Electron Magnetic field chemistry Quadrupole Electron temperature Atomic physics
Zdroj:	Japanese Journal of Applied Physics. 49:086001
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.49.086001
Popis:	A Monte Carlo simulation of electron transport in electric and magnetic fields was performed to analyze experimental data of the electron temperature T e and electron number density n e measured in a magnetic neutral loop discharge (NLD) plasma driven in Ar at 0.13 Pa. T e and n e in the vicinity of the substrate holder were measured with a triple probe, and their radial profiles had peaks at different radial positions. The simulation reproduced these peak positions well under the chosen boundary condition that the electron reflectivity of the side wall was lower than that of the reactor ceiling and the substrate holder. It was explained that the T e peak was formed by high-energy electrons transported from the neutral loop along a separatrix of the quadrupole magnetic field and that the n e peak consisted of electrons undergoing reciprocating motion between the reactor ceiling and the substrate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8285b1fbccbe9dc072b1b2935d5e79f3 https://doi.org/10.1143/jjap.49.086001 Zobrazit plný text záznamu