The shape memory effect in nanoscale composites based on Ti2NiCU alloy
Autor: | Alexey Mashirov, D. A. Dikan, A. M. Zhikharev, N. Yu. Tabachkova, S. Y. Zibtsev, A. V. Irzhak, P. V. Lega, Alexander Shelyakov, Vladimir G. Shavrov, Nikolay Sitnikov, P. V. Mazaev, Dmitry Zakharov, S. V. von Gratowski, M. Yu. Berezin, G. Martynov, Andrey Orlov, V. V. Koledov, N. Kasyanov, V. Ya. Pokrovsky |
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Rok vydání: | 2016 |
Předmět: |
010302 applied physics
Nanoelectromechanical systems Materials science Composite number Alloy 02 engineering and technology Shape-memory alloy engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Active layer Thermoelastic damping Diffusionless transformation 0103 physical sciences engineering Composite material 0210 nano-technology Layer (electronics) |
Zdroj: | 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). |
Popis: | The shape memory effect (SME) in alloys with thermoelastic martensitic transformation provides a unique possibility to create the tiny mechanical devices for NEMS / MEMS technology. SME observed in layered composite microstructors produced by FIB CVD technology, consisting of Ti2NiCu alloy layer with SME and platinum elastic layer at reducing the thickness of the active layer for at least 80 nm. In this paper the physical and technological restrictions were experimentally examined on the minimum thickness of the active layer of the composites for SME manifestation. |
Databáze: | OpenAIRE |
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