Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment
| Autor: | Noritaka Kawasegi, Hideki Sasaoka, Kazuma Ozaki, Kazuhito Nishimura, Noboru Morita |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Cutting tool business.industry Mechanical Engineering Diamond Nanotechnology General Chemistry engineering.material Focused ion beam Electronic Optical and Magnetic Materials Diamond cutting Surface micromachining Machining Materials Chemistry engineering Optoelectronics Electrical and Electronic Engineering Tool wear business Diamond tool |
| Zdroj: | Diamond and Related Materials. 49:14-18 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2014.07.013 |
| Popis: | We describe a technique to improve diamond cutting tools used in nanometer- and micrometer-scale machining and formed via focused-ion-beam (FIB) micromachining. Although FIB irradiation is an effective means of fabricating arbitrary miniature shapes in diamond cutting tools, FIB irradiation induces a non-diamond phase, as well as Ga ion implantation, in the irradiated area. This adversely affects the performance of the ultra-precision machining process, especially in terms of tool life and the quality of the machined surface. To eliminate the affected layer, we applied heat-treatment techniques and investigated the optimum thermal profiles. A temperature of 500 °C applied to the cutting tool provided optimal machining of nickel phosphorus. The tool life was significantly improved, and a tool life similar to that of a non-irradiated diamond tool was obtained. The quality of the machined surface was also improved markedly owing to superior tool wear and adhesion resistance. |
| Databáze: | OpenAIRE |
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