PC‐based digital apparatus with temperature compensation for measurement of thin films during deposition

Autor:	C. Barchesi, Marco Luce, A. Cricenti, Renato Generosi
Rok vydání:	1993
Předmět:	Exothermic reaction Materials science Depot business.industry Enthalpy of vaporization Evaporation (deposition) Vacuum evaporation Optics Deposition (phase transition) Optoelectronics Thin film business Instrumentation Quartz
Zdroj:	Review of Scientific Instruments. 64:2952-2953
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1144339
Popis:	We present an apparatus for controlling the deposition of thin films. The apparatus is based on a quartz resonator whose frequency is controlled digitally by a computer. Temperature variations of the quartz during the evaporation process, attributed to the exothermic heat of condensation and radiation heating from the evaporation source, are compensated. A very stable deposition rate and a good film thickness evaluation are obtained.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::81a5566a6ef27aa98f27b5fed945bcbf https://doi.org/10.1063/1.1144339 Zobrazit plný text záznamu