New Yield-Impacting Polishing Induced Defects (PID) and A Method to Identify Them for Polished Si Substrates
| Autor: | Hyo Sik Suh, Byeongsam Moon, KeunSu Kim, Jiae Kim, Sivakumar Venkat, Sanghyun Lee, William Shen, Yong Shin, Jonggeun Park, Jeonghoon An, Scott Seo, SungKi Park |
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| Rok vydání: | 2008 |
| Zdroj: | ECS Meeting Abstracts. :2012-2012 |
| ISSN: | 2151-2043 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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