Case Study: Design and Construction of the Draper Laboratory Microfabrication Center

Autor:	Livia M. Racz, Richard Morrison, David J. D. Carter
Rok vydání:	2013
Předmět:	Microelectromechanical systems Engineering Environmental Engineering Cleanroom business.industry Systems engineering Environmental Chemistry Mechanical engineering Iso standards Center (algebra and category theory) Safety Risk Reliability and Quality business Microfabrication
Zdroj:	Journal of the IEST. 56:3-16
ISSN:	1557-2196 1098-4321
DOI:	10.17764/jiet.56.1.t755m81670245652
Popis:	For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.
Databáze:	OpenAIRE
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