Sintered aerosol masks for dry‐etched quantum dots

Autor:	Hans-Christen Hansson, Knut Deppert, Alfred Weidensohler, Lars Samuelson, Ivan Maximov
Rok vydání:	1994
Předmět:	Materials science Nanostructure Fabrication Physics and Astronomy (miscellaneous) business.industry Sintering Nanotechnology Aerosol Semiconductor Quantum dot Etching Optoelectronics Particle business
Zdroj:	Applied Physics Letters. 64:3293-3295
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.111314
Popis:	We report on a sintering step in producing ultra‐fine silver aerosol particles to serve as etch masks for semiconductor quantum‐dot structures. Our experiments found heating conditions that reshape the Ag particles, resulting in a spherical shape and very good size uniformities. Using this improved aerosol generation technology, we have dry etched InP columns with 24±5 nm diameter and with very good uniformity, with nearly every aerosol particle resulting in a column. Column arrays with a density as high as 3×109 cm−2 could be produced.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::815cc1d1441ac7677d9c48711b5acdbf https://doi.org/10.1063/1.111314 Zobrazit plný text záznamu