Generation of a Stable Vacuum Field by Using a Micro Capillary

Autor:	Satoshi Akimichi, Masahiro Hirata, Hajime Yoshida, Kenta Arai, Sakae Komatsu
Rok vydání:	2006
Předmět:	Leak Field (physics) Chemistry Capillary action Dynamic range Mass flow controller Analytical chemistry Mechanics Gauge (firearms) Condensed Matter Physics Stability (probability) Surfaces Coatings and Films Calibration Electrical and Electronic Engineering
Zdroj:	Shinku. 49:129-131
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.49.129
Popis:	It is necessary to generate a stable vacuum field for calibration of vacuum gauges by direct comparison with a reference gauge. According to ISO/TS 3536, it is required that the pressure indicated by the gauges shall be stable over time so that it dose not change more than 0.5% for time period of 2.5 min. In this study, three methods to generate a vacuum filed, namely, by using a variable leak valve, a mass flow controller and a combination in a capillary with a pressure controller, are evaluated from the viewpoint of both the stability and dynamic range of generated pressure. The vacuum field generated by a combination in a capillary with a pressure controller is the most stable of the three methods and satisfied the ISO/TS 3536 requirement over the range from 3.1×10-4 to 4.8 Pa. This method is effective to generate a stable vacuum field for calibration of vacuum gauge.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8156c00c042275aaac146312ad933ddb https://doi.org/10.3131/jvsj.49.129 Zobrazit plný text záznamu