$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration
| Autor: | Mohammad Maroufi, Hamed Alemansour, Anthony G. Fowler, S. O. Reza Moheimani, M. Bulut Coskun |
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| Rok vydání: | 2019 |
| Předmět: |
0209 industrial biotechnology
Materials science Cantilever Acoustics Feedthrough 02 engineering and technology Feedback loop 021001 nanoscience & nanotechnology Displacement (vector) 020901 industrial engineering & automation Control and Systems Engineering Control theory Q factor System on a chip Electrical and Electronic Engineering 0210 nano-technology Actuator |
| Zdroj: | IEEE Transactions on Control Systems Technology. 27:2271-2278 |
| ISSN: | 2374-0159 1063-6536 |
| Popis: | Microcantilevers featuring separate built-in actuation and displacement sensing capabilities allow effective and simple implementation of control methods, opening a pathway to achieving higher scan speeds in tapping-mode atomic force microscopy. Such active cantilevers are a significant milestone to eventually obtain video-rate on-chip atomic force microscopes (AFMs) that can even surpass the functionality and imaging speed of their macroscale counterparts at a significantly lower cost. In this brief, we present an active AFM cantilever with an on-chip actuator and two built-in displacement sensors, designed to be integrated into on-chip AFMs. The common feedthrough problem present in this type of architecture is addressed by a differential sensing configuration, and the revealed dynamics are used for the system identification. A positive position feedback controller is designed to actively tailor the $Q$ factor of the cantilever. The imaging performance of the microcantilever with and without $Q$ control is compared by attenuating the cantilever’s $Q$ factor from 177 to 15 using the feedback loop. A common artifact in high-speed scans, the parachuting effect, is mitigated, rendering higher imaging speeds achievable. |
| Databáze: | OpenAIRE |
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